Alicat Gas Flow Controllers

  • Pressure based mass flow instrumentation for top performance
  • 0.6% of reading accuracy on most flow instruments
  • 4 ms response time
  • No warm up
  • Four process variables
  • Built in display
  • Industrial protocols
  • Pressure compensation
  • Temperature compensation
  • Wide dynamic flow ranges

Alicat BASIS Series Compact Controllers for OEM Applications

BASIS™ mass flow controllers offer repeatable, reliable gas flow control in a compact, economical package for high-quantity orders. Designed for stress-free integration within original equipment manufacturer (OEM) products, BASIS features a small footprint, high-accuracy MEMS sensor and Alicat’s leading fast valve control.

  • Reliable: BASIS controllers won’t let you down. NIST-traceable accuracy and repeatable control ensure that your product works the same on Day 700 as it did on Day 1.
  • Responsive: Pressure spikes won’t ruin your day. Industry-leading control speed and PD valve tuning lets BASIS mass flow controllers get ahead of the unexpected.
  • Compatible: Do more with BASIS controllers. A small footprint, calibration for multiple gases and dual analog-digital communications give your team greater design flexibility.
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Alicat Bio Series Bioreactor Gas Flow Controllers

Bio-Series meters and controllers are designed and constructed specifically for mass flow control in bioreactors and fermenters, upstream or downstream. They offer the highest reliability in the industry, with communication protocols to integrate with your existing system. Alicat’s experience in process stages from benchtop R&D through GMP production of biologics and biosimilars ensure robust solutions that will scale with your development.
Reliable, adaptable, and compatible flow control, built to your preferred industrial protocols for Bio-Series integration with Pharma 4.0 systems

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Alicat MC Series Standard Gas Flow Controllers

Responsive gas flow control that suppresses pressure fluctuations

An excellent MFC needs to do only one thing well: keep the flow rate at your setpoint. Alicat’s MC series gas mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.

  • Versatile: Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
  • Connected: Easy integration into your digital industrial network with Ethernet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
  • Durable: MC series flow controllers can temporarily flow liquids without getting destroyed. For environmental hardiness, we can build your MFC with IP66 ingress protection.
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Alicat MCE Series Vacuum Gas Mass Flow Controllers

Update your vacuum deposition fixtures with a state-of-the-art Alicat MCE or MCV. The MCE features the same rapid control response of our standard mass flow controller in a form factor that includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs.

The MCV marries the MCE to an integrated pneumatic shut-off valve for hard vacuum applications. Connect an air line to the shut-off valve to prevent contamination during zero setpoint conditions.

  • Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
  • Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
  • Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
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Alicat MCQ Series High Pressure Gas Flow Controllers

The MCQ flow controller delivers the fast control response of our standard controller to applications that require higher line pressures (160-320 psia). This high-pressure mass flow controller achieves new setpoints rapidly and stays there, even in the face of pressure spikes. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control.

  • Versatile: Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
  • Connected: Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
  • Durable: Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
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Alicat MCV Series Vacuum Gas Mass Flow Controllers

Update your vacuum deposition fixtures with a state-of-the-art Alicat MCE or MCV. The MCE features the same rapid control response of our standard mass flow controller in a form factor that includes welded 1/4″ VCR fittings and matches end to end with SEMI standard MFCs.

The MCV marries the MCE to an integrated pneumatic shut-off valve for hard vacuum applications. Connect an air line to the shut-off valve to prevent contamination during zero setpoint conditions.

  • Versatile. Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
  • Connected. Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
  • Durable. Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
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Alicat MCW Series Low Pressure Drop Controllers

Alicat “Whisper” Series mass flow controllers with low pressure drop are ideal for controlling mass and volumetric flow rates when there is little available system pressure. Low pressure drop minimizes system impact, enabling flow control at near-atmospheric pressures and shortening system response times. We’ll use your application parameters to customize your valve and PID tuning to ensure that it delivers fast and stable control while maintaining low pressure drop.

  • Versatile: Control pressure while monitoring flow rates, select another gas calibration on the fly or define your own gas composition with COMPOSER™.
  • Connected: Easy integration into your digital industrial network with EtherNet/IP, EtherCAT, DeviceNet, Profibus, Modbus (RTU and TCP/IP) or serial communications options.
  • Durable: Backed by annual recalibrations and our limited lifetime warranty, an Alicat instrument will keep your process running smoothly, even in challenging environments, for years to come.
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