MCS Series Controller Corrosion resistant flow control

SENSOR AND CONTROL PERFORMANCE

Mass flow accuracy1 Standard accuracy: ± 0.8% of reading and ± 0.2% of full scale

High accuracy (≥ 5 SCCM and ≤ 500 SLPM): ± 0.4% of reading and ± 0.2% of full scale

Flow repeatability (2σ) ± 0.2% of full scale

Pressure accuracy1 ± 0.5% of full scale

Steady state control range 1 – 100% of full scale (100:1 turndown ratio)

Operating pressure range 11.5 – 160 PSIA

Pressure sensitivity Mass flow zero shift and span shift: ± (0.08% of reading + 0.02% of full scale) per atm from tare pressure

Temperature sensitivity Mass flow zero shift and span shift: ± 0.02% of full scale per °C from 25°C

Temperature accuracy ± 0.75°C

Operating temperature range −10 – 60°C (ambient and gas)

Valve function Normally closed

Totalizer volume uncertainty ± 0.1% of reading in additional uncertainty

Sensor response time < 1 ms

Typical control response time

For 63% of step change (T63), user-adjustable:

0.5 SCCM–5 SCCM: 100–4000 ms

10 SCCM–20 SLPM: 30–4000 ms

50 SLPM–12,000 SLPM: 30–150 ms

Typical indication response time

0.5 SCCM–5 SCCM: 100–4000 ms

10 SCCM–20 SLPM: <10 ms

50 SLPM–12,000 SLPM: 65–255 ms

Typical warm-up time < 1 s

 

MECHANICAL

Wetted materials 316L / 303 / 430FR stainless steel, FFKM standard, FKM or EPDM as needed for some gases.

MCRS/MCRHS: Add 410 stainless steel and PTFE

Maximum pressure Damage possible above 200 PSIA common mode pressure.

Damage possible above 75 PSID differential pressure.

Relative humidity range 0 – 95%, non-condensing

Ingress protection IP40 (consult Alicat for weatherproofing options)

Mounting orientation sensitivity MCRS and MCRHS-Series: Mount with valve cylinders vertical and upright

All others: None after tare

Mounting holes 0.5 SCCM–20 SLPM: 2× 8-32 UNC threaded ↧ 0.175″ [4.45 mm]

50 SLPM–12,000 SLPM: 4-8× 8-32 UNC threaded ↧ 0.330″ [8.38 mm]

POWER AND COMMUNICATIONS

Digital input and output options RS-232 Serial and Modbus RTU (default),

RS-485 Serial and Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFINET, PROFIBUS, IO-Link

Digital data update rate2 40 Hz at 19200 baud

Analog input and output options 4 – 20 mA, 0 – 5 Vdc, 1 – 5 Vdc, 0 – 10 Vdc

Analog data update rate 1 kHz

Analog signal accuracy ± 0.1% of full scale additional uncertainty

Interactive display Monochrome LCD or color TFT display with integrated touchpad; simultaneously

displays mass flow, volumetric flow, temperature, setpoint, and pressure

Display update rate 10 Hz

Electrical connection options 6-pin locking, 8-pin mini-DIN, 8-pin M12, 9-pin DB-9, 15-pin DB-15 (contact Alicat for custom pinouts)

Power requirements2

MCS: 12 – 30 Vdc, 250 mA

MCRS (≤ 3000 SLPM): 24 Vdc, 1 A

MCRHS (Dual rolamite valves): 24 – 30 Vdc, 2 A

MCRS (> 5000 SLPM): 24 – 30 Vdc, 2.1 A

Add 40 mA if equipped with 4 – 20 mA output

 

RANGE-SPECIFIC TECHNICAL DATA

0.5 SCCM MCS 1.0 PSID M5 female (10-32 compatible)4

1 – 5 SCCM MCS 2.0 PSID M5 female (10-32 compatible)4

10 SCCM MCS 2.8 PSID M5 female (10-32 compatible)4

50 SCCM MCS 1.0 PSID M5 female (10-32 compatible)4

100 – 500 SCCM MCS 1.0 PSID 1/8" NPT female

1 SLPM MCS 1.5 PSID 1/8" NPT female

2 SLPM MCS 3.0 PSID 1/8" NPT female

5 SLPM MCS 2.0 PSID 1/8" NPT female

10 SLPM MCS 5.5 PSID 1/8" NPT female

20 SLPM MCS 20.0 PSID 1/8" NPT female

50 SLPM MCRS 2.5 PSID 1/4″ NPT female

100 SLPM MCRS 2.5 PSID 1/4″ NPT female

250 SLPM MCRS 2.4 PSID 1/2″ NPT female

500 SLPM MCRS 6.5 PSID 3/4″ NPT female

1000 SLPM MCRS 14.0 PSID 3/4″ NPT female

2000 SLPM MCRS 28.6 PSID 3/4″ NPT female (1 1/4″ NPT connection available)

3000 SLPM MCRS 16.8 PSID 1 1/4″ NPT female

5000 SLPM MCRHS 14.1 PSID 1 1/2″ NPT female

10,000 SLPM MCRS 30.0 PSID 2″ NPT female

11,000 SLPM MCRS 40.0 PSID 2″ NPT female

12,000 SLPM MCRS 72.0 PSID 2″ NPT female